MEMS devices have found a broad usage in biomedical field. Remote handling of biomedical data of implantable requires wireless transmission. The radiofrequency (RF) filter plays an important role in wireless communication. In this paper, an optimized MEMS resonator is designed. The design and optimization of SMR resonator utilizes piezoelectric thin-film material viz. AlN, ZnO, PZT, BaTiO3 and LiNbO3. Each of them is appropriate for RF filters due to their distinct material characteristics. For low noise and extremely sensitive communication systems require high Q factors. By evaluating the various piezoelectric materials, the Quality factor of SMR resonator is calculated. The performance of a SMR in relation to the stages of Bragg's reflector arrangement and its material is studied. W/SiO2-based Bragg's reflector configurations based on AlN gives good performance in terms of Quality factor.

MEMS, Piezoelectric, SMR, BAW, Quality Factor