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Volume 19 No 6 (2021)
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Effects of Substrates on Structural and Morphological Characteristics of Radio Frequency Sputtered ZnO Layers
Omar Hamad Alzobaedy , Noor Najmuldeen , A.A. Salim , H. Bakhtiar
Abstract
High quality Zinc Oxide nanostructures (ZONSs) with customized traits became demanding for diverse applications.
Based on this fact, some ZONSs with varied layer thicknesses (100 to 400 nm) were deposited on three types of Si
(plain, polished and etched) and borosilicate glass substrates using the radio frequency (RF) sputtering method. Asdeposited samples were characterized systematically using various techniques to determine the effects of the
substrates on their structures and morphologies
Keywords
RF Sputtering, Substrate, ZONSs, Structure, Morphology
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