Sol-gel deposition technique has many advantages to synthesis nano-oxide thin films. Surface morphology and structural properties of the film depend on the doping and solvent solution used with optimal parameters. The ratio of surface to volume is positive for the gas senor. Zirconium oxide can be considered a remarkable material and this attributed to its superb mechanical, biological and optical characteristics. For this reason, five different samples of Zirconium oxide thin films were deposited by the sol-gel technique with numerous molarities (0.25, 0.05, 0.075, 0.1 and 0.125M). The XRD technique shows that there are two phases, one of them is tetragonal Zirconia (t-ZrO2) and the other one is monoclinic Zirconia (m-ZrO2). The increment in tetragonal phase has been occurring at high molarities of the solution. ZrO2 thin film crystalline size increases with increasing solution molarities. UV-Vis spectra reveal that ZrO2 thin film has transmission value higher than 70%. Finally, the sensor measurements show that fast response (4s) and quick recovery time (10s).

Zirconia Thin Films, SOL-GEL, Ammonia Gas SND Gas Sensor.